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Journal Articles

Impact of the ground-state 4${it f}$ symmetry for anisotropic ${it cf}$ hybridization in the heavy-fermion superconductor CeNi$$_{2}$$Ge$$_{2}$$

Fujiwara, Hidenori*; Nakatani, Yasuhiro*; Aratani, Hidekazu*; Kanai, Yuina*; Yamagami, Kohei*; Hamamoto, Satoru*; Kiss, Takayuki*; Yamasaki, Atsushi*; Higashiya, Atsushi*; Imada, Shin*; et al.

Physical Review B, 108(16), p.165121_1 - 165121_10, 2023/10

 Times Cited Count:0 Percentile:0(Materials Science, Multidisciplinary)

Journal Articles

Formation of high-quality SiO$$_{2}$$/GaN interfaces with suppressed Ga-oxide interlayer via sputter deposition of SiO$$_{2}$$

Onishi, Kentaro*; Kobayashi, Takuma*; Mizobata, Hidetoshi*; Nozaki, Mikito*; Yoshigoe, Akitaka; Shimura, Takayoshi*; Watanabe, Heiji*

Japanese Journal of Applied Physics, 62(5), p.050903_1 - 050903_4, 2023/05

While the formation of an GaO$$_{x}$$ interlayer is key to achieving SiO$$_{2}$$/GaN interfaces with low defect density, it can affect the reliability and stability of metal-oxide-semiconductor (MOS) devices if the annealing conditions are not properly designed. In the present study, we aimed to minimize the growth of the GaO$$_{x}$$ layer on the basis of the sputter deposition of SiO$$_{2}$$ on GaN. Synchrotron radiation X-ray photoelectron spectrometry measurements confirmed the suppressed growth of the GaO$$_{x}$$ layer compared with a SiO$$_{2}$$/GaN structure formed by plasma-enhanced chemical vapor deposition. Negligible GaO$$_{x}$$ growth was also observed when subsequent oxygen annealing up to 600$$^{circ}$$C was performed. A MOS device with negligible capacitance-voltage hysteresis, nearly ideal flat-band voltage, and low leakage current was demonstrated by performing oxygen and forming gas annealing at temperatures of 600$$^{circ}$$C and 400$$^{circ}$$C, respectively.

Journal Articles

Evaluation of doped potassium concentrations in stacked two-Layer graphene using real-time XPS

Ogawa, Shuichi*; Tsuda, Yasutaka; Sakamoto, Tetsuya*; Okigawa, Yuki*; Masuzawa, Tomoaki*; Yoshigoe, Akitaka; Abukawa, Tadashi*; Yamada, Takatoshi*

Applied Surface Science, 605, p.154748_1 - 154748_6, 2022/12

 Times Cited Count:3 Percentile:48.5(Chemistry, Physical)

Immersion of graphene in KOH solution improves its mobility on SiO$$_{2}$$/Si wafers. This is thought to be due to electron doping by modification with K atoms, but the K atom concentration C$$_{K}$$ in the graphene has not been clarified yet. In this study, the C$$_{K}$$ was determined by XPS analysis using high-brilliance synchrotron radiation. The time evolution of C$$_{K}$$ was determined by real-time observation, and the C$$_{K}$$ before irradiation of synchrotron radiation was estimated to be 0.94%. The C 1s spectrum shifted to the low binding energy side with the desorption of K atoms. This indicates that the electron doping concentration into graphene is decreasing, and it is experimentally confirmed that K atoms inject electrons into graphene.

Journal Articles

Restoration of oxygen vacancies on an anatase TiO$$_{2}$$(001) surface with supersonic seeded oxygen molecular beam

Katsube, Daiki*; Ono, Shinya*; Inami, Eiichi*; Yoshigoe, Akitaka; Abe, Masayuki*

Vacuum and Surface Science, 65(11), p.526 - 530, 2022/11

The oxidation of oxygen vacancies at the surface of anatase TiO$$_{2}$$ (001) was investigated by synchrotron radiation photoelectron spectroscopy and supersonic O$$_{2}$$ beam (SSMB). The oxygen vacancies at the top surface and subsurface could be eliminated by the supply of hyperthermal oxygen molecules. Oxygen vacancies are present on the surface of anatase TiO$$_{2}$$(001) when it is untreated before transfer to a vacuum chamber. These vacancies, which are stable in the ambient condition, could also be effectively eliminated by using oxygen SSMB. This result is promising as a surface processing for various functional oxides.

Journal Articles

Electrical properties and energy band alignment of SiO$$_{2}$$/GaN metal-oxide-semiconductor structures fabricated on N-polar GaN(000$$bar{1}$$) substrates

Mizobata, Hidetoshi*; Tomigahara, Kazuki*; Nozaki, Mikito*; Kobayashi, Takuma*; Yoshigoe, Akitaka; Hosoi, Takuji*; Shimura, Takayoshi*; Watanabe, Heiji*

Applied Physics Letters, 121(6), p.062104_1 - 062104_6, 2022/08

 Times Cited Count:1 Percentile:17.38(Physics, Applied)

The interface properties and energy band alignment of SiO$$_{2}$$/GaN metal-oxide-semiconductor (MOS) structures fabricated on N-polar GaN(000$$bar{1}$$) substrates were investigated by electrical measurements and synchrotron-radiation X-ray photoelectron spectroscopy. They were then compared with those of SiO$$_{2}$$/GaN MOS structures on Ga-polar GaN(0001). Although the SiO$$_{2}$$/GaN(000$$bar{1}$$) structure was found to be more thermally unstable than that on the GaN(0001) substrate, excellent electrical properties were obtained for the SiO$$_{2}$$/GaN(000$$bar{1}$$) structure by optimizing conditions for post-deposition annealing. However, the conduction band offset for SiO$$_{2}$$/GaN(000$$bar{1}$$) was smaller than that for SiO$$_{2}$$/GaN(0001), leading to increased gate leakage current. Therefore, caution is needed when using N-polar GaN(000$$bar{1}$$) substrates for MOS device fabrication.

Journal Articles

Impact of post-nitridation annealing in CO$$_{2}$$ ambient on threshold voltage stability in 4H-SiC metal-oxide-semiconductor field-effect transistors

Hosoi, Takuji*; Osako, Momoe*; Moges, K.*; Ito, Koji*; Kimoto, Tsunenobu*; Sometani, Mitsuru*; Okamoto, Mitsuo*; Yoshigoe, Akitaka; Shimura, Takayoshi*; Watanabe, Heiji*

Applied Physics Express, 15(6), p.061003_1 - 061003_5, 2022/06

 Times Cited Count:2 Percentile:34.67(Physics, Applied)

The combination of NO annealing and subsequent post-nitridation annealing (PNA) in CO$$_{2}$$ ambient for SiO$$_{2}$$/SiC structures has been demonstrated to be effective in obtaining both high channel mobility and superior threshold voltage stability in SiC-based metal-oxide-semiconductor field-effect transistors (MOSFETs). N atoms on the SiO$$_{2}$$ side of the SiO$$_{2}$$/SiC interface incorporated by NO annealing, which are plausible cause of charge trapping sites, could be selectively removed by CO$$_{2}$$-PNA at 1300$$^{circ}$$C without oxidizing the SiC. CO$$_{2}$$-PNA was also effective in compensating oxygen vacancies in SiO$$_{2}$$, resulting high immunity against both positive and negative bias-temperature stresses.

Journal Articles

Impact of nitridation on the reliability of 4H-SiC(11$$bar{2}$$0) MOS devices

Nakanuma, Takato*; Kobayashi, Takuma*; Hosoi, Takuji*; Sometani, Mitsuru*; Okamoto, Mitsuo*; Yoshigoe, Akitaka; Shimura, Takayoshi*; Watanabe, Heiji*

Applied Physics Express, 15(4), p.041002_1 - 041002_4, 2022/04

 Times Cited Count:5 Percentile:48.5(Physics, Applied)

The leakage current and flat-band voltage (VFB) instability of NO-nitrided SiC (11$$bar{2}$$0) (a-face) MOS devices were systematically investigated. Although NO nitridation is effective in improving the interface properties, we found that it reduces the onset field of Fowler-Nordheim (F-N) current by about 1 MVcm$$^{-1}$$, leading to pronounced leakage current. Synchrotron X-ray photoelectron spectroscopy revealed that the nitridation reduces the conduction band offset at the SiO$$_{2}$$/SiC interface, corroborating the above finding. Furthermore, systematical positive and negative bias stress tests clearly indicated the VFB instability of nitrided a-face MOS devices against electron and hole injection.

Journal Articles

Revisit of XPS studies of supersonic O$$_{2}$$ molecular adsorption on Cu(111); Copper oxides

Hayashida, Koki*; Tsuda, Yasutaka; Yamada, Takashi*; Yoshigoe, Akitaka; Okada, Michio*

ACS Omega (Internet), 6(40), p.26814 - 26820, 2021/10

 Times Cited Count:7 Percentile:44.69(Chemistry, Multidisciplinary)

We report the X-ray photoemission spectroscopy (XPS) characterization of the bulk Cu$$_{2}$$O(111) surface and 8-type and 29-type oxide structures on Cu(111) prepared by using 0.5 eV O$$_{2}$$ supersonic molecular beam (SSMB) source. We propose a new structural model for the 8-type oxide structure and also confirmed the previously proposed model for the [29] oxide structure on Cu(111), based on the O1s XPS spectra. The detection-angle dependence of the O 1s spectra supports that the nanopyramidal model is more preferable for the ($$sqrt{3}$$X$$sqrt{3}$$)R30$$^{circ}$$ Cu$$_{2}$$O(111). We also report the electronic excitations which O1s electrons suffer.

Journal Articles

Oxidation of anatase TiO$$_{2}$$(001) surface using supersonic seeded oxygen molecular beam

Katsube, Daiki*; Ono, Shinya*; Takayanagi, Shuhei*; Ojima, Shoki*; Maeda, Motoyasu*; Origuchi, Naoki*; Ogawa, Arata*; Ikeda, Natsuki*; Aoyagi, Yoshihide*; Kabutoya, Yuito*; et al.

Langmuir, 37(42), p.12313 - 12317, 2021/10

 Times Cited Count:1 Percentile:6.77(Chemistry, Multidisciplinary)

We investigated the oxidation of oxygen vacancies at the surface of anatase TiO$$_{2}$$(001) using supersonic seeded molecular beam (SSMB) of oxygen. The oxygen vacancies at the top-surface and sub-surface could be eliminated by the supply of oxygen using an SSMB. These results indicate that the interstitial vacancies can be mostly assigned to oxygen vacancies, which can be effectively eliminated by using an oxygen SSMB. Oxygen vacancies are present on the surface of anatase TiO$$_{2}$$(001) when it is untreated before transfer to a vacuum chamber. These vacancies, which are stable in the as-grown condition, could also be effectively eliminated using the oxygen SSMB.

Journal Articles

Two-step model for reduction reaction of ultrathin nickel oxide by hydrogen

Ogawa, Shuichi*; Taga, Ryo*; Yoshigoe, Akitaka; Takakuwa, Yuji*

Journal of Vacuum Science and Technology A, 39(4), p.043207_1 - 043207_9, 2021/07

 Times Cited Count:1 Percentile:7.86(Materials Science, Coatings & Films)

Nickel (Ni) is used as a catalyst for nitric oxide decomposition and ammonia production but it is easily oxidized and deactivated. Clarification of the reduction process of oxidized Ni is essential to promote more efficient use of Ni catalysts. In this study, the reduction processes were investigated by in situ time-resolved photoelectron spectroscopy. We propose a two-step reduction reaction model. The rate-limiting process for the first step is surface precipitation of O atoms and that of the second step is dissociation of H$$_{2}$$ molecules.

Journal Articles

Oxidation reaction kinetics on transition metal surfaces observed by real-time photoelectron spectroscopy

Ogawa, Shuichi*; Zhang, B.*; Yoshigoe, Akitaka; Takakuwa, Yuji*

Vacuum and Surface Science, 64(5), p.218 - 223, 2021/05

The oxidation reaction kinetics on Ti(0001) and Ni(111) surfaces were observed by real-time photoelectron spectroscopy using synchrotron radiation to measure the oxidation state and oxide thickness. After the Ti(0001) surface was wholly covered by TiO with a thickness of 1.2 nm, the rapid growth of n-type TiO$$_{2}$$ proceeded through the diffusion of Ti$$^{4+}$$ ions to the TiO$$_{2}$$ surface at 400$$^{circ}$$C. A saturation of oxygen uptake on the TiO surface indicates that the O$$_{2}$$ sticking coefficient on the TiO surface is negligibly small and the segregation of Ti to the TiO surface is a trigger to initiate the TiO$$_{2}$$ growth. On the Ni(111) surface at 350$$^{circ}$$C, a thermally stable NiO$$_{x}$$ proceeded preferentially and then the growth of p-type NiO was initiated. The time evolution of NiO thickness was represented by a logarithmic growth model, where the NiO growth is governed by the electron tunneling to the NiO surface.

Journal Articles

Interface atom mobility and charge transfer effects on CuO and Cu$$_{2}$$O formation on Cu$$_{3}$$Pd(111) and Cu$$_{3}$$Pt(111)

Tsuda, Yasutaka; Gueriba, J. S.*; Makino, Takamasa*; Di$~n$o, W. A.*; Yoshigoe, Akitaka; Okada, Michio*

Scientific Reports (Internet), 11, p.3906_1 - 3906_8, 2021/02

 Times Cited Count:3 Percentile:16.03(Multidisciplinary Sciences)

Journal Articles

Development of ${it spatiotemporal}$ measurement and analysis techniques in X-ray photoelectron spectroscopy; From NAP-HARPES to 4D-XPS

Toyoda, Satoshi*; Yamamoto, Tomoki*; Yoshimura, Masashi*; Sumida, Hirosuke*; Mineoi, Susumu*; Machida, Masatake*; Yoshigoe, Akitaka; Suzuki, Satoru*; Yokoyama, Kazushi*; Ohashi, Yuji*; et al.

Vacuum and Surface Science, 64(2), p.86 - 91, 2021/02

We have developed ${it spatiotemporal}$ measurement and analysis techniques in X-ray photoelectron spectroscopy. To begin with, time-division depth profiles of gate stacked film interfaces have been achieved by NAP-HARPES (Near Ambient Pressure Hard X-ray Angle-Resolved Photo Emission Spectroscopy) data. We then have promoted our methods to quickly perform peak fittings and depth profiling from time-division ARPES data, which enables us to realize 4D-XPS analysis. It is found that the traditional maximum entropy method (MEM) combined with Jackknife averaging of sparse modeling in NAP-HARPES data is effective to perform dynamic measurement of depth profiles with high precision.

Journal Articles

Surface segregation effect for prevention of oxidation in Ni-X (X=Sn, Sb) alloy by in situ photoelectron spectroscopy

Doi, Takashi*; Yoshigoe, Akitaka

Surface and Interface Analysis, 52(12), p.1117 - 1121, 2020/12

 Times Cited Count:1 Percentile:2.52(Chemistry, Physical)

Ni-base alloys has been widely used for chemical plants because of their high strength and excellent oxidation resistance. In particular, the addition of Sn and Sb in Ni-base alloys significantly improves the metal dusting resistance. It is indicated that Sn and Sb are segregated on the alloy surface in the metal dusting environment; however, the details have not been clarified yet. The behavior of the Ni-Sn and Ni-Sb alloys under a high-temperature oxidation environment was investigated by in situ X-ray photoelectron spectroscopy. It was confirmed that Sn and Sb have been segregated at the surface of their alloys during oxidation in low oxygen potential environment. These results indicate that Sn and Sb segregation improves the metal dusting resistance.

Journal Articles

Dynamic observation and theoretical analysis of initial O$$_{2}$$ molecule adsorption on polar and $$m$$-plane surfaces of GaN

Sumiya, Masatomo*; Sumita, Masato*; Asai, Yuya*; Tamura, Ryo*; Uedono, Akira*; Yoshigoe, Akitaka

Journal of Physical Chemistry C, 124(46), p.25282 - 25290, 2020/11

 Times Cited Count:10 Percentile:40.15(Chemistry, Physical)

The initial oxidation of different GaN surfaces [the polar Ga-face (+c) and N-face (-c) and the nonpolar (10$$bar{1}$$0) ($$m$$)plane] under O$$_{2}$$ molecular beam irradiation was studied by real-time synchrotron radiation X-ray photoelectron spectroscopy and DFT molecular dynamics calculation. The results predict that triplet O$$_{2}$$ either dissociates or chemisorbs at the bridge position on the +c-surface, while on N-terminated -c-surface the O$$_{0}$$2 molecule only undergoes dissociative chemisorption. On the $$m$$-GaN surface, although the dissociation of O$$_{2}$$ is dominant, the bond length and angle were found to fluctuate from those of O$$_{2}$$ molecules adsorbed on the polar surfaces. The computational model including both the surface spin and polarity of GaN is useful for understanding the interface between GaN and oxide layers in metal-oxide electronic.

Journal Articles

Gas barrier properties of chemical vapor-deposited graphene to oxygen imparted with sub-electronvolt kinetic energy

Ogawa, Shuichi*; Yamaguchi, Hisato*; Holby, E. F.*; Yamada, Takatoshi*; Yoshigoe, Akitaka; Takakuwa, Yuji*

Journal of Physical Chemistry Letters (Internet), 11(21), p.9159 - 9164, 2020/11

 Times Cited Count:3 Percentile:18.31(Chemistry, Physical)

Atomically thin layers of graphene have been proposed to protect surfaces through the direct blocking of corrosion reactants such as oxygen with low added weight. The long term efficacy of such an approach, however, is unclear due to the long-term desired protection of decades and the presence of defects in as-synthesized materials. Here, we demonstrate catalytic permeation of oxygen molecules through previously-described impermeable graphene by imparting sub-eV kinetic energy to molecules. These molecules represent a small fraction of a thermal distribution thus this exposure serves as an accelerated stress test for understanding decades-long exposures. The permeation rate of the energized molecules increased 2 orders of magnitude compared to their non-energized counterpart. Graphene maintained its relative impermeability to non-energized oxygen molecules even after the permeation of energized molecules indicating that the process is non-destructive and a fundamental property of the exposed material.

Journal Articles

Synchrotron radiation photoelectron spectroscopy study on oxides formed at Ge(100)2$$times$$1 surface in atmosphere

Yoshigoe, Akitaka

Japanese Journal of Applied Physics, 59(SM), p.SMMB05_1 - SMMB05_5, 2020/07

 Times Cited Count:0 Percentile:0(Physics, Applied)

This study presents the results on synchrotron radiation photoelectron spectroscopy (SR-XPS) analysis of oxides formed in the air on a well-defined clean Ge(100)2$$times$$1 surface prepared in UHV condition. Owing to high energy-resolution SR-XPS, detailed chemical information on Ge oxidation states at the Ge surface was clarified. The result showed that the water vapor in the atmosphere plays an important role to progress slow oxidation of the Ge surface. We believe that the data obtained in this study is valuable for the basic understanding of the formation mechanisms of native oxides at the Ge surfaces.

Journal Articles

Roles of strain and carrier in silicon oxidation

Ogawa, Shuichi*; Yoshigoe, Akitaka; Tang, J.*; Sekihata, Yuki*; Takakuwa, Yuji*

Japanese Journal of Applied Physics, 59(SM), p.SM0801_1 - SM0801_42, 2020/07

 Times Cited Count:5 Percentile:33.01(Physics, Applied)

In this paper, we review the study of the unified Si oxidation reaction model mediated by point defect generation, in which O$$_{2}$$ dissociative adsorption occurs at dangling bonds of point defects (emitted Si atoms and vacancies) at the SiO$$_{2}$$/Si interface, and the point defect generation rate is given by a combination of oxidation-induced strain, thermal strain due to the difference in thermal expansion coefficient between Si and SiO$$_{2}$$, thermal excitation of Si emission rate, and heat of adsorption.

Journal Articles

Evaluation and mitigation of reactive ion etching-induced damage in AlGaN/GaN MOS structures fabricated by low-power inductively coupled plasma

Nozaki, Mikito*; Terashima, Daiki*; Yoshigoe, Akitaka; Hosoi, Takuji*; Shimura, Takayoshi*; Watanabe, Heiji*

Japanese Journal of Applied Physics, 59(SM), p.SMMA07_1 - SMMA07_7, 2020/07

 Times Cited Count:2 Percentile:12.5(Physics, Applied)

AlGaN/GaN metal-oxide-semiconductor (MOS) structures were fabricated by low-power inductively coupled plasma reactive ion etching and chemical vapor deposition of SiO$$_{2}$$ dielectrics on the etched surfaces, and they were systematically investigated by physical and electrical characterizations in an effort to develop a low-damage recessed gate process. The comprehensive research demonstrates the significant advantages of the proposed low-damage recessed gate process for fabricating next-generation AlGaN/GaN MOS-HFET devices.

Journal Articles

Initial oxidation kinetics of Si(113)-(3$$times$$2) investigated using supersonic seeded molecular beams

Ono, Shinya*; Tanaka, Kazuma*; Kodama, Hiraku*; Tanaka, Masatoshi*; Yoshigoe, Akitaka; Teraoka, Yuden*

Surface Science, 697, p.121600_1 - 121600_6, 2020/07

 Times Cited Count:1 Percentile:6.04(Chemistry, Physical)

The initial oxidation on silicon surfaces with (113) orientation has been investigated by high-resolution photoelectron spectroscopy with synchrotron radiation. In the present study, we investigated both the Si2p state and O1s state to evaluate the oxide thickness, composition, and to assess the strain at the SiO$$_{2}$$/Si interface. In the Si2p state, the oxidized components (Si$$^{1+}$$, Si$$^{2+}$$, Si$$^{3+}$$, Si$$^{4+}$$) were analyzed. In the O1s state, a low-binding-energy component (LBC) and a high-binding-energy component (HBC) were analyzed. To investigate the non-thermal oxidation process, we utilized the supersonic seeded molecular beam (SSMB) to enhance the translational kinetic energies ($$E_{rm t}$$) of oxygen molecules. We demonstrate that the oxide quality and oxidation kinetics are largely altered by changing $$E_{rm t}$$.

135 (Records 1-20 displayed on this page)